磁性液体薄膜微形变的磁控研究  

Research on the Micro-Deformation of the Magnetic Fluid Thin Film by the Magnetic Control

作　　者：刘同冈[1] 郭岩[1] 邹学壮[1] 吴健[1] 

机构地区：[1]中国矿业大学机电工程学院,江苏徐州221116

出　　处：《微纳电子技术》2014年第4期229-235,共7页Micronanoelectronic Technology

基　　金：中央高校基本科研业务费专项资金资助项目(2012QNA32);江苏省自然科学基金资助项目(BK20131114)

摘　　要：针对磁性液体薄膜在MEMS加工领域作为光刻掩膜的应用,为获得磁性液体薄膜在磁场作用下的微形变规律,设计了一套磁场下磁性液体薄膜微形变的磁控测试实验台,并从磁场强度、磁性液体种类、磁性液体中磁性颗粒质量分数、磁性液体量和磁场梯度五个方面对其微形变特性进行实验研究。利用磁性液体薄膜形变高度和半径两个参数对其微形变效果进行了评价,实验结果表明:磁性液体薄膜凸起高度与磁场强度平方呈正比;基载液密度低的磁性液体凸起高度大;烃基磁性液体在磁性颗粒质量分数为25%时形变效果最好;磁性液体在达到一定的体积后其凸起高度几乎不变;磁场梯度越大,其凸起高度越明显,形变图形越佳。In view of the nanoparticle magnetic fluid film as the lithography mask in MEMS pro- cessing, a test experiment rig for testing the micro deformation of the magnetic fluid thin film was designed to obtain the micro deformation law of the magnetic fluid thin film under the magnetic field. The micro deformation law of the magnetic fluid thin film was experimental studied by the five factors, i.e. the magnetic field intensity, magnetic fluid type, mass fraction of the magnetic particle in the magnetic fluid, quality of the magnetic fluid and gradient of the magnetic field. The deformation effect was evaluated with the height and radius of the magnetic fluid film de- formation. The experimental results show that the bump height of the magnetic fluid film is pro- portional to the square of the magnetic field intensity; the carrier liquid with a low density bulges higher; the hydrocarbon based magnetic liquid has the maximum height at the mass fraction of 25% for the magnetic particle; with other conditions unchanged, its height is almost unchanged when the volume of the magnetic liquid increases to a certain value; the larger the gradient of the magnetic field, the more obvious of the bump height is and better of the deformation pattern is.

关 键 词：磁性液体 薄膜 磁控 光刻掩膜 微形变 

分 类 号：TB383[一般工业技术—材料科学与工程] O482.54[理学—固体物理]