基于多体系统理论的精密检测平台空间误差建模与补偿  

Volumetric Error Modeling and Compensation of Precision Measuring Platform Based on Multi-system Theory

作　　者：张东旭[1] 杨平[1] 杨峰[1] 王詹帅[1] 谢银辉[1] 郭隐彪[1] 

机构地区：[1]厦门大学机电工程系,福建厦门361005

出　　处：《兵工学报》2014年第4期501-508,共8页Acta Armamentarii

基　　金：国家自然科学基金项目(51075343);福建省自然科学基金项目(2012J05098)

摘　　要：针对大口径光学元件精密检测平台的工作特点及影响其空间误差的各项几何误差因素，运用多体系统理论，用低序体阵列描述多体系统拓扑结构，建立一种空间误差数学模型。综合应用激光干涉仪、球杆仪和激光位移传感器等仪器设备，提出大口径光学元件精密检测平台各项几何误差和空间误差的测量方法，并对模型中所涉及的各项几何误差进行了系统分析和全面测量，对空间误差进行补偿。误差补偿实验证明所提模型正确有效，将空间误差从补偿前一70．01～22．14μm降低到补偿后-4．22～5．8μm，大大提高了精密检测平台的测量精度。A volumetric error model is proposed according to the working characteristics and the geometric errors of a large-size optical element precision measuring platform. The volumetric error model is based on multi-system theory, and the topological structures of the multi-system theory are described by the number arrays of low-order body. To testify the volumetric error model, a new combined measurement experiment by the application of laser interferometer, double-ball bar, laser displacement sensor and other relative instruments is conducted for measuring the geometric and volumetric errors of the measuring platform before and after error compensation. The error compensation experiments show that the volumetric error is reduced from - 70.01 ～ 22.14 μm to - 4.22 ～ 5.8 μm, which also reflects the validity of the volumetric error model.

关 键 词：仪器仪表技术 精密检测平台 多体系统理论 空间误差 模型 测量方法 补偿 

分 类 号：TG743[金属学及工艺—刀具与模具]