大口径凸非球面面形检测方法研究  

Study on Large Convex Aspherical Lens Testing

作　　者：宋强[1,2] 杨宝喜[1,2] 袁乔[1] 李璟[1] 朱菁[1,2] 黄惠杰[1,2] 

机构地区：[1]中国科学院上海光学精密机械研究所信息光学与光电技术实验室,上海201800 [2]中国科学院大学,北京100049

出　　处：《中国激光》2014年第4期175-181,共7页Chinese Journal of Lasers

基　　金：国家国际科技合作专项(2011DFR10010);国家科技重大专项(2011ZX02402)

摘　　要：提出了在非球面检验中以反射镜补偿法线像差的方法,用于大口径凸非球面透镜的检测,克服了在检测大口径非球面透镜时一般需要采用多片透镜补偿的困难,降低了设计难度和装调难度,节约了加工成本。设计并研制了大口径凸非球面透镜检测系统,对误差来源进行了分析并给出消除方法。对直径Φ270mm的凸非球面透镜进行检测,测得的非球面面形误差峰谷(PV)值与均方根(RMS)值分别为0.585λ和0.083λ。该方法为大口径非球面透镜检测提供了技术参考,能够适用于大口径透镜粗抛光阶段中的面形检测。A surface measurement method of convex aspherical lens with large clear aperture is proposed based on an aspherical compensation mirror. It overcomes the difficulty that multiple lenses are needed for compensating the normal aberration of convex aspherical lens. In addition, it simplifies the design and reduces the cost. Aspherical lens measurement system with large diameter is designed and implemented. Source of error is systematically analyzed, and elimination method of error is also proposed. In order to verify the feasibility of the proposed method, a convex aspherical lens with an aperture of 270 mm is inspected. The peak valley （PV） value and root mean square （RMS） of the tested aspherical surface are 0. 585）, and 0. 083A, respectively. This method provides a technical reference for large aperture aspherical surface testing, and also can be used in the field of rough polishing testing.

关 键 词：测量 光学测量 光学制造 非球面 零位补偿 

分 类 号：O436[机械工程—光学工程]