聚合物／SiO2混合波导2×2热光开关的制备与测试  

Fabrication and measurement of a polymer/SiO_2 hybrid waveguide 2×2 thermo-optic switch

作　　者：梁磊[1] 曲禄成 张立钧[1] 郑传涛[1] 孙小强[1] 王菲[1] 张大明[1] 

机构地区：[1]吉林大学电子科学与工程学院 集成光电子学国家重点联合实验室吉林大学实验区,吉林长春130012

出　　处：《光电子．激光》2014年第4期642-647,共6页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(61177027,61077041,61107021);国家教育部博士点基金(20110061120052,20120061130008);中国博士后科学基金(20110491299,2012T50297);吉林省科技发展计划(20110315,20130522161JH);吉林大学基本科研业务基金(201103076)资助项目

摘　　要：利用聚合物材料SU-8作为芯层、聚合物材料PMMA作为上包层、无机材料SiO2作为下包层,设计并制备了一种有机/无机混合波导2×2定向耦合-马赫曾德尔(DC-MZI)热光开关。为了保证波导中的单模传输、减小模式辐射和衬底泄露损耗、缩短响应时间并降低器件功耗,对其结构参数做了优化。利用涂膜、湿法刻蚀等工艺制备了器件样品。在1 550nm波长下,器件的交叉态和直通态的驱动功率分别为0和7.8mW(开关功率为7.8mW),交叉态和直通态的两端口串扰分别为-9dB和-12.8dB。在方波驱动电压信号作用下,测得器件交叉端口的上升时间和下降时间分别为138μs和136μs,直通端口的上升时间和下降时间分别为63μs和140μs。制备的混合结构器件综合利用了芯层聚合物材料热光系数大、上/下缓冲层厚度均较小以及Si/SiO2导热系数大的优点,因此同时具备了较低的功耗和较快的响应时间,在低功耗、快速光通信系统中具有较好的应用前景。An organic/inorganic hybrid 2× 2 directional coupler Mach-Zehnder interferometer （DC-MZI） thermo-optic （TO） switch is designed and fabricated by using the negative photoresist SU-8, polymer PMMA and silica as core, upper cladding and lower cladding,respectively. The structural parameters are optimized for assuring fundamental mode propagation, decreasing radiation loss and leakage loss, shortening response time and minimizing power consumption. Fabrication techniques,including spin-coating,wetetching,ete,are adopted to develop the device sample. Under 1550 nm,the driving power at cross state and that at bar state are measured to be 0 and 7.8 mW,respectively,which indicates a switching power of 7.8 mW . The crosstalks between the two ports under cross state and bar state are - 9 dB and -12.8 dB,respectively. Under the function of square-wave switching signal, the rise time and fall time of the cross-port are 138us and 136 us,respectively,and those of the bar-port are 63 us and 140us,respectively. Compared with the thermo-optic switches with Si/SiO2 structure and full polymer structure, the proposed hybrid device possesses lower power consumption and faster response simultaneously,owning to the advantages including larger TO coefficient for polymer core material,thinner upper/under claddings and larger thermal conductivity of silica relative to polymer.

关 键 词：集成光电子器件 平面光波导器件 热光开关 聚合物 

分 类 号：TN256[电子电信—物理电子学]