光纤端面宽带减反射膜制备  

Preparation of broadband anti-reflection coating on the end of fiber

作　　者：高婷[1] 曲轶[1] 郑晓刚[1] 李再金[1] 

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022

出　　处：《光电子．激光》2014年第4期687-691,共5页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金委员会和中国物理研究院联合基金(U1330136)资助项目

摘　　要：为了提高高功率半导体激光器光纤耦合系统中光纤的透过率以及耦合效率，通过高精密研磨抛光技术处理光纤端面，选取高激光损伤阈值薄膜材料，优化膜系结构，采用直接光控技术和离子辅助沉积法，成功地在光纤芯直径为100um的多模光纤（MMF）端面上镀制了宽带减反射膜。测试结果表明，在900-1100nm波段光纤双端面光损耗降低6％，总透射率达到99．2％，有效提高了光纤耦合系统中光纤耦合效率。The beam characteristics of semiconductor laser are worse, its beam divergence angle is larger, and the light spot is oval and uneven,which directly affect the device coupling efficiency. In order to improve the fiber transmittance and the coupling efficiency in the fiber coupling system with high power semiconductor laser, first, the end of fiber is processed by the high precision grinding polishing technology;and then by high laser damage threshold materials choosing and the structure optimization of film system, using electron-beam vacuum coating and ion assisted deposition, the broadband reflective film is successfully achieved on the end of multi-mode fiber whose core diameter is 100 um. The test results show that the double-end optical loss of the fiber is reduced by 6 % in 900--1100 nm band, and the total transmission can be 99.2% . The fiber coupling efficiency of optical fiber coupling system is effectively improved.

关 键 词：半导体激光器 光纤端面 增透膜 直接光控技术 

分 类 号：TN365[电子电信—物理电子学]