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作 者:赵意意[1,2] 杨建峰[1] 薛彬[1] 闫兴涛[1,2]
机构地区:[1]中国科学院西安光学精密机械研究所,陕西西安710119 [2]中国科学院大学,北京100049
出 处:《红外与激光工程》2014年第4期1182-1187,共6页Infrared and Laser Engineering
基 金:国家自然科学基金(60808028);国家863计划(2009AA122203);中国科学院光谱成像重点实验室开放基金
摘 要:针对光谱仪小型化、高分辨率的发展趋势,设计了一种结构简单、宽谱段、消像散的小型光谱仪。具体分析了折叠光路Czerny-Turner光谱仪各种像差的原理和校正方法。推导了柱透镜宽谱段消像散的理论方程。作为实例,设计了一款谱段为300~900 nm、物方数值孔径0.08的小型光谱仪。该光谱仪采用折叠光路结构以减小尺寸,添加柱透镜以消除整个谱段的像散。结果表明:该光谱仪结构简单紧凑,体积小,实现了宽谱段的消像散,全谱段光谱分辨率优于0.5 nm。For the development trend of miniaturization and high-resolution of spectrometer, an optical design with a simple structure, broadband, astigmatism-corrected micro spectrometer was designed. The principle and correction method of the aberration of crossed beam czerny-turner spectrometer were analyzed in detail. The broadband astigmatism-corrected theory equations using cylindrical lens were deduced. For example, a micro spectrometer operating in 300-900 nm with an object NA of 0.08 has been designed. This spectrometer adopted crossed beam structure to minish its volume and used a cylindrical lens to remove astigmatism over the full bandwidth. The analyzed results demonstrated that this spectrometer with compact configuration and small volume corrected the astigmatism in the wide spectral region. The resolution of the spectrometer was better than 0.5 nm in the whole spectral region.
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