单晶硅基体上紫外光诱导生长铜微纳米粒子薄膜  

UV photoinduced growth of copper micro-nanoparticles film on single-crystalline silicon

作　　者：樊莉红[1] 陈福义[1] 刘婧[1] 张金生[1] 

机构地区：[1]西北工业大学凝固技术国家重点实验室,西安710072

出　　处：《中国有色金属学报》2014年第1期197-203,共7页The Chinese Journal of Nonferrous Metals

基　　金：国家自然科学基金资助项目(50971100;50671082);西北工业大学基础研究基金资助项目(NPU-FFR-ZC200931);凝固技术国家重点实验室自主研究课题(30-TP-2009)

摘　　要：在室温条件下，通过紫外光诱导方法在 n 型单晶硅表面成功地生长出长度为1.66~5.80μm、宽度为1.27~2.84μm、厚度在0.24~0.73μm之间变化的铜微纳米粒子。采用电子显微镜（SEM）观察到单个铜粒子表面光滑，并出现数个粒子聚集形成K或L形状的粒子团聚现象。结果表明：改变溶液组分浓度和光照时间可以对铜微纳米粒子的尺寸和致密度进行有效控制。以浓度为1·10-5 mol/L罗丹明6G作探测分子，对制备的铜微纳米粒子薄膜的表面增强拉曼散射（SERS）效应进行研究，证实经过铜微纳米粒子修饰后的单晶硅对其表面吸附分子的拉曼信号确实有增强作用，这是因为铜粒子的表面等离子体效应能够提高样品表面局域场的电场强度。Copper micro-nanoparticles with edge lengths of 1.66-5.80 μm, width of 1.27-2.84 μm and thicknesses of 0.24-0.73 μm were grown on n-type silicon wafers photoinduced by the UV light at room temperature. The electron microscope characterizations （SEM） indicate that the single copper particle has smooth surfaces and several granules gather together to form different shapes like K and L. The results show that the density and dimensions of the resulting copper micro-nanoparticles can be controlled effectively by tuning the concentration of the solution components and illumination time of the varying reaction conditions. The micro-nano copper particles film from the surface-enhanced Raman scattering （SERS） effect using 1·10-5 mol/L Rhodamine 6G as probe molecules reveal that the single-crystalline silicon modified with copper micro-nanoparticles can enhance Raman signals of interesting molecules because the surface-plasmon effects of copper particles can improve the local electric fields of the sample.

关 键 词：单晶硅 光诱导 微纳米粒子 铜 表面增强拉曼散射 

分 类 号：TF811[冶金工程—有色金属冶金]