A 16-bit sigma–delta modulator applied in micro-machined inertial sensors  

作　　者：徐宏林 付强 刘鸿娜 尹亮 王鹏飞 刘晓为 

机构地区：[1]MEMS Center, Harbin Institute of Technology [2]Key Laboratory of Micro-Systems and Micro-Structures Manufacturing

出　　处：《Journal of Semiconductors》2014年第4期128-133,共6页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.61204121)

摘　　要：A fourth-order low-distortion low-pass sigma-delta （∑△） modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm^2 with 23 pads. The experimental results indicate a signal-to-noise ratio （SNR） of 100 dB and dynamic range （DR） of 103 dB at an oversampling rate （OSR） of 128 with the input signal amplitude of-3.88 dBFS at 9.8 kHz; the power consumption is 15 raW at a 5 V supply.A fourth-order low-distortion low-pass sigma-delta （∑△） modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm^2 with 23 pads. The experimental results indicate a signal-to-noise ratio （SNR） of 100 dB and dynamic range （DR） of 103 dB at an oversampling rate （OSR） of 128 with the input signal amplitude of-3.88 dBFS at 9.8 kHz; the power consumption is 15 raW at a 5 V supply.

关 键 词：analog-to-digital converter low-distortion low-pass sigma delta modulator micro-machined inertialsensor 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]