Design and experimental research on a visible-near infrared spatial modulating Fourier transform spectrometer based on micro multi-step mirrors  

作　　者：秦余欣 梁静秋 梁中翥 田超 吕金光 王维彪 

机构地区：[1]State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences

出　　处：《Optoelectronics Letters》2014年第3期172-175,共4页光电子快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.61027010 and 61376122);Jilin Province Science and Technology Development Plan(Nos.201205025 and 20130206010GX);Changchun Science and Technology Plan(No.11DJ03);State Key Laboratory of Applied Optics Own Funds

摘　　要：A type of spatial modulating micro Fourier transform spectrometer(FTS) based on micro multi-step mirrors(MMSMs) is designed and manufactured in this paper.The interference system is based on Michelson interferometer,using two MMSMs instead of plane mirrors in two arms.The recovered spectrum is simulated with different distances between MMSMs and the detector,and the influence of diffraction on the recovered spectrum is analyzed.The edge-enlarging method for the MMSMs is proposed to eliminate edge noise,and the influence of surface roughness of MMSMs on the recovered spectrum is also analyzed.Moreover,the way of manufacturing the MMSMs is investigated.A type of spatial modulating micro Fourier transform spectrometer （FTS） based on micro multi-step mirrors （MMSMs） is designed and manufactured in this paper. The interference system is based on Michelson interferometer, using two MMSMs instead of plane mirrors in two arms. The recovered spectrum is simulated with different distances between MMSMs and the detector, and the influence of diffraction on the recovered spectrum is analyzed. The edge-enlarging method for the MMSMs is proposed to eliminate edge noise, and the influence of surface roughness of MMSMs on the recovered spectrum is also analyzed. Moreover, the way of manufacturing the MMSMs is investigated.

关 键 词：傅里叶变换光谱仪 空间调制 设计 多步 近红外 迈克耳孙干涉仪 实验 表面粗糙度 

分 类 号：TH744.1[机械工程—光学工程] TP301.6[机械工程—仪器科学与技术]