MSM光电探测器电磁场特性的TLM方法模拟  

Transmission Line Matrix Method Simulation for Electromagnetic Characteristics of Metal-semiconductor-metal Photodetector

作　　者：石世长[1] 王庆康[1] 

机构地区：[1]上海交通大学微电子技术研究所,200030

出　　处：《固体电子学研究与进展》2001年第1期43-49,共7页Research & Progress of SSE

摘　　要：介绍了利用传输线矩阵方法模拟和分析金属 -半导体 -金属光电探测器指栅电容的频率响应。应用时域电磁场三维 TL M方法模拟分析了指栅间距和指栅间的耦合长度与光电探测器截止频率的关系。文中还报道了本项研究所开发的三维电磁场时域模拟器 TLM Simulator 2 .0及其功能。数值实验结果说明模拟器对微波结构的电磁场模拟是精确、有效的 ,具有很好的应用价值。By using transmission line matrix method, the simulation and analysis for frequency response of interdigital capacitors in metal-semiconductor metal photodetector is described. It is shown that the gap and coupling length between fingers of interdigital capacitors contribute to cutoff frequency of photodetector. The paper also reports a three-dimension time-domain electromagnetic simulator (TLM Simulator 2.0) developed for the research. The experiment result proves that the simulation is precise and useful for electromagnetic simulation of microwave devices.

关 键 词：传输线矩阵方法 金属-半导体-金属光电探测器 电磁场特性 

分 类 号：TN36[电子电信—物理电子学]