通过噪声的分析评价实现划片刀的结构优化  

Structure Optimization for a High-speed Rotating Scribing Knife Based on Noise Analysis and Evaluation

作　　者：李东亚[1] 冯志华[1] 胡攀登 

机构地区：[1]苏州大学应用技术学院,江苏苏州215000 [2]库力索法半导体(苏州)有限公司,江苏苏州215000

出　　处：《噪声与振动控制》2014年第1期188-190,共3页Noise and Vibration Control

摘　　要：针对超高速旋转划片刀实际工作时存在的切削噪声问题,用INV 3018 G型振动与控制分析仪器对其切削晶圆的划片刀结构进行实验分析,利用改变划片刀工艺凹槽角度α的数值,得出不同角度对应转速的频谱图,并应用统计数据图表的方法,整理分析得到角度和频谱峰值的变化曲线图,确定工艺凹槽角度α对其结构的影响,得出对应的峰值最小即产生的噪声较小。结果表明:不同工艺凹槽角度α对高速旋转划片刀结构的设计有一定意义。Aiming at the cutting noise problem of the scribing knife rotating at ultra high speed, the structure of thecutting wafer scribing knife is analyzed experimentally using INV 3018 G vibration and control analysis instrument. Bychanging the process groove angle α of the scribing knife, the speed spectrum diagram corresponding to different angles α isobtained. Applying statistical data chart, curves of angle α vs. the frequency spectrum peaks are plotted, with which theinfluence of the process groove angle α on the structure’s performance can be determined. It can be concluded that the angleα corresponding to the minimum peak value will produce small noise only. This work is of some significance for thestructure design of high-speed rotating scribing-knives.

关 键 词：声学 超高速切削 工艺凹槽角度α 频谱峰值 噪声 

分 类 号：TB535[理学—物理]