(AlCrMoNiTi)N_x和(AlCrMoZrTi)N_x薄膜的摩擦特性  

Frictional Behavior of(AlCrMoNiTi)N_x and (AlCrMoZrTi)N_x Films

作　　者：任波[1,2] 郭鹏[3] 赵瑞锋[1] 王新莉[1] 李刚[1] 张红松[1] 关绍康[2] 

机构地区：[1]河南工程学院机械工程学院 [2]郑州大学材料科学与工程学院 [3]郑州职业技术学院机械工程系

出　　处：《特种铸造及有色合金》2014年第4期337-341,共5页Special Casting & Nonferrous Alloys

基　　金：国家博士后基金面上资助项目(2013M541986);郑州大学博士后基金资助项目;河南工程学院博士基金资助项目;郑州市科技发展计划资助项目(20130803)

摘　　要：采用射频磁控溅射技术在S304不锈钢和纯Cu基体上成功制备出了(AlCrMoNiTi)Nx和(AlCrMoZrTi)Nx高熵合金氮化物薄膜,采用微磨损试验机对两种薄膜的摩擦特性进行了研究。结果表明,(AlCrMoZrTi)Nx薄膜在S304不锈钢和纯Cu衬底上的最小摩擦因数分别为0.182和0.127,最高耐磨寿命为1 200s。在两种衬底上,(AlCrMoZrTi)Nx薄膜的摩擦性能均优于(AlCrMoNiTi)Nx薄膜,其原因主要在于薄膜中Zr的固溶强化效果高于Ni,因而薄膜的摩擦性能得到增强。两种薄膜在S304不锈钢和Cu衬底上的磨损机制主要为磨粒磨损。The （A1CrMoNiTi）Nx and （A1CrMoZrTi）Nx high entropy alloy nitride films were fabricated successfully by radio frequency （RF） magnetron sputtering on the S304 stainless steel and on Cu sub- strates, respectively. The frictional behavior of the film prepared was examined on a Micro-Tribotester. The experimental results show that the （A1CrMoZrTi）Nx films have the minimum friction coefficient of 0. 182 and 0. 127 on the S304 stainless steel and on Cu substrates, respectively and the maximum wear life of 1200 s. On both substrates, the frictional behavior of （A1CrMoZrTi）Nx films are superior to that of （A1CrMoNiTi）Nx films , which is attributed to solid-solution strengthening effect of Zr element supe- rior to that of Ni. The frictional mechanism of the two kinds of films is characterized by abrasive wear on the substrates of S304 stainless and on Cu.

关 键 词：高熵合金 氮化物薄膜 固溶强化 磨粒磨损 

分 类 号：TG174.4[金属学及工艺—金属表面处理] TG135.6[金属学及工艺—金属学]