电轴法在超精密电容式传感器中的应用  

The application of electric axis method in the measurement of precision capacitance transducer

作　　者：付敬业[1] 张洪刚 赵玉春 郭静 李跃平 郑义忠 

机构地区：[1]天津大学精密测试及仪器国家重点实验室

出　　处：《宇航计测技术》2000年第4期17-23,共7页Journal of Astronautic Metrology and Measurement

摘　　要：在电场理论中电轴法的基础上 ,导出了局部场域的电容计算式 ,为电容传感器在精密测量中的应用提供了理论依据 ,这为经典的电轴法开辟了新的应用领域并给出了几种粗糙度等级的被测表面的近似值与精确计算结果的对比。The capacitive formula of the local field derived from the electric axis method in field theory provides a close theoretical basis for the design of capacitance transducer in the precision measurement. Besides electric power and dispatch transmission the results find the new application for the classical electric axis method. Presents the comparison between each value of approximate computation and that of the exact one.

关 键 词：电轴法 电容式传感器 表面粗糙度 精密测量 

分 类 号：TG84[金属学及工艺—公差测量技术]