四极质量分析器装配工艺研究  

Research on a Assembly Process of the Quadrupole Mass Filter

作　　者：吴定柱[1] 蒋家东[1] 易忠全[1] 胡军[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所超精密加工技术重点实验室,四川绵阳621900

出　　处：《机械设计与制造》2014年第5期73-74,78,共3页Machinery Design & Manufacture

基　　金：国家重大科学仪器设备开发专项资金资助(2011YQ130043)

摘　　要：四极杆质谱计是目前最成熟、应用最广泛的小型质谱计之一。四极杆质量分析器是四极式质谱仪的核心部件,使离子在四极场中受到强聚焦作用而向分析器的中心轴聚焦。四极质量分析器零件主要精度误差都要求小于0.002mm,且组件平行度、位置度误差要求均小于0.004mm,传统装配方法已经很难满足精度要求。提出了一种基于手工修研的装配方法,利用该方法装配了一套150型四极质量分析器,最高装配内切圆精度误差小于0.0015mm。Quadrupole mass filter is a matured miniature mass spectrometer that has been widely used. The quadrupole mass filter is one of the most important parts in in mass spectrometry（MS） used in the analysis area, for ions in the quadrupole field experienced strong focusing are concentrated to the center of the quadrupole mass filter. But the manufacturing errors are all less than 0.002 millimeter and the assembly errors of the quadrupole mass filter are less than 0.004 millimeter, which has not been met for the traditional assembly method~ A new assembly process of the quadrupole mass filter is put forward, which is based on manual lapping. One quadrupole mass filter has been made by this method, and the top assembly accuracy is 0.0015 millimeter.

关 键 词：四极质量分析器 手工修配 比较测量 

分 类 号：TH16[机械工程—机械制造及自动化] TH744