非球面超精密气浮式测头设计及仿真  

Design and Simulation of Pneumatic Control Probe for Ultra-precision Asphere Measurement

作　　者：尹韶辉[1] 彭杰宏 唐昆[1] 陈逢军[1] 胡天[1] 

机构地区：[1]湖南大学国家高效磨削工程技术研究中心,长沙410082

出　　处：《中国机械工程》2014年第10期1279-1285,共7页China Mechanical Engineering

基　　金：国家自然科学基金项目资助(51175167;51205120);国际科技合作专项资助(2012DFG70640)

摘　　要：非球面接触式测量过程中,采用空气静压轴承的气浮式测头,可以减小测量探针对被测表面的压力和测头移动过程中所受的摩擦力。设计了一种非球面超精密气浮式测头,采用工程算法对其方形空气静压轴承进行了尺寸设计,建立了三种采用不同节流孔形式的轴承设计模型,同时分别对这三个轴承工作时内部的气流以及整个测头内部的气流建立了有限元模型,并采用 Fluent 流体计算软件对以上气流模型的气压分布、压强以及流量进行了仿真计算,预测了测头的静态性能。结果表明,测头刚度可达1.77 MN/m,测头与被测表面之间的接触力可控制在0.1～7 mN 之间,所消耗空气流量最多为3.6 m3/h,满足测头设计要求。In the course of asphere contact-type measurement,the pneumatic control probe with aerostatic bearing was adopted to decrease the pressure where measuring probe acted on measured sur-face and the frictional force of the probe in the motion.A pneumatic control probe was designed herein for ultra-precision asphere measurement,the size of the square aerostatic bearing was calcuated by en-gineering algorithm,and three kinds of bearing model with different throttle orifices were established. At the same time,the finite element models for the internal air flow in the three bearing and the probe on the working status were established respectively.The pressure distribution,pressure intensity and air flow rate of the above flow model were simulated by using Fluent fluid calculation software,and the probe static performance was also forecasted.The results show that the stiffness of the probe can reach 1.77 MN/m,the magnitude of contact force between the probe and measured surface can be con-trolled in 0.1～7 mN,the maximum consumed air flow can reach 3.6 m3/h,and it meets the design re-quirements of the probe.

关 键 词：非球面 气浮式测头 空气静压轴承 气腔 仿真 

分 类 号：TG87[金属学及工艺—公差测量技术]