用于大尺度团簇交叉碰撞实验的差分抽气系统的设计与真空监测  

Design of a differential pumping system for large-scale cluster cross-collision experiments and vacuum monitoring

作　　者：方才进[1] 缪竞威[2] 师勉功 朱洲森[1] 

机构地区：[1]四川师范大学物理与电子工程学院,四川成都610000 [2]四川大学原子核科学技术研究所,四川成都610000

出　　处：《真空》2014年第3期13-16,共4页Vacuum

基　　金：国家自然科学基金资助项目(11125175)

摘　　要：本研究是给大尺度团簇与微团簇交叉碰撞实验提供一套性能稳定、真空度高的差分抽气系统。介绍了差分抽气系统的整体结构、真空泵以及真空测量与自动记录系统的性能。实验测试了差分抽气系统达到稳定真空的时间等参量,分析了第二级差分抽气区真空值异动的原因。用脉冲喷射的实验方法,测试了差分抽气系统工作性能及指标,并对装置可以改进的方面做了一些探讨。In this study, a differential pumping system with stable performance and high vacuum was provided for cross-colli-sion experiments between large-scale clusters and micro clusters , and the overall structure , the vacuum pumps and the vacuum measurement and recording system were described. Experiments tested the time that differential pumping system required to reach a stable vacuum, analyzed the reason of vacuum value transaction in the second differential pumping zone. The performance and indicators of differential pumping system was tested by experimental methods with pulse jet , and the improvement of the device was discussed.

关 键 词：脉冲喷射团簇源 差分抽气系统 ZDF型复合真空测量体系 真空监测 

分 类 号：O562.5[理学—原子与分子物理]