双排全幅宽无间隔布局快速蒸发ZnS镀膜技术的研究  

The coating technology of rapid evaporation of ZnS in double row full width layout without spacing

作　　者：罗军文 

机构地区：[1]兰州真空设备有限责任公司,甘肃兰州730050

出　　处：《真空》2014年第3期41-43,共3页Vacuum

摘　　要：本文详细介绍了双排全幅宽无间隔布局快速蒸发ZnS镀膜技术的工作原理、结构组成、性能特点和创新设计要点。分析并指出影响ZnS镀膜质量、生产效益的主要因素和解决途径。重点论述了提高ZnS镀膜速度和膜层均匀性的科学依据,解决了当前高档激光防伪膜制作中出现的镀膜效率低、均匀性差、光学性能不稳定等难题。首创折回式条带状折槽形式Mo蒸发舟和蒸发气体均匀分配器结构及独特的蒸发舟双连排全幅宽无间隔连续排列布局,使ZnS镀膜速度达到400 m/min以上,整个幅宽面镀膜的均匀性控制在5%以内。This paper describes working principle of the coating technology of rapid evaporation of ZnS in double row full width layout without spacing and it′s structures,innovative design features.Analyzed and pointed out the main reasons affecting ZnS coating quality,production efficiency and solutions.Focused on the scientific basis for improving the speed and uniformity of ZnS coating,which solve the low efficiency,poor uniformity,optical properties instability and other problems in the current high-end laser anti-counterfeit coating manufacturing.First created folded back style banded Mo evaporation boat,gas distributor structure and unique evaporation boat double row full width continuous arrangement layout without interval.ZnS coating speed can reach more than 400 m/min,and the surface coating uniformity of entire width is within 5%.

关 键 词：蒸发舟 无间隔布局 气体均匀分配器 镀膜 

分 类 号：TB79[一般工业技术—真空技术] TB43