磁性液体的微致动性能  

Micro Actuation Performance of the Magnetic Fluid

作　　者：郭岩[1] 刘同冈[1] 吴健[1] 

机构地区：[1]中国矿业大学机电工程学院,江苏徐州221116

出　　处：《微纳电子技术》2014年第5期297-301,共5页Micronanoelectronic Technology

基　　金：中央高校基本科研业务费专项资金资助项目(2012QNA32);江苏省自然科学基金资助项目(BK20131114)

摘　　要：针对磁性液体在MEMS微致动器中的应用,对磁性液体在磁场中致动力的影响因素进行了理论分析。根据理论分析结果设计了一套磁性液体微致动性能测试实验台,并从磁场强度、磁性液体受力面积和磁性液体质量三个方面对其微致动性能进行实验研究。实验结果表明:磁性液体致动力与磁场强度近似呈线性关系;等量磁性液体作用面积越大,致动力越大;磁性液体致动力随磁性液体质量的增加不断增加,当磁性液体质量达到一定值时,磁性液体致动力大小趋于稳定。In view of the application of the magnetic fluid in the MEMS micro actuator,the influence factors on the actuation force of the magnetic fluid in the magnetic field were theoretical analyzed.Based on the theoretical analysis results,a test rig was designed to test the micro actuation performance of the magnetic fluid.The micro actuation performance of the magnetic fluid was experimental studied from three aspects of the magnetic field intensity,the load-carrying area of the magnetic fluid and the quality of the magnetic fluid.The experimental results show that the relationship between the actuation force of the magnetic fluid and magnetic field intensity is linear.The greater the effect area of the equivalent magnetic fluid,the greater the actuation force is.The actuation force of the magnetic liquid continually increases with the increase of the magnetic fluid quality,and the actuation force of the magnetic liquid tends to stabilize when the magnetic fluid quality reaches a certain value.

关 键 词：微机电系统(MEMS) 磁性液体 微致动器 实验台 微致动力 

分 类 号：TB383[一般工业技术—材料科学与工程] O482.54[理学—固体物理]