可变载频径向剪切雅敏干涉仪  

Radial shearing Jamin interferometer with variable carrier frequency

作　　者：朱勇建[1,2] 那景新[2] 王宇[1] 职亚楠[3] 范玉峰[1] 

机构地区：[1]浙江科技学院机械与汽车工程学院,浙江杭州310023 [2]吉林大学汽车仿真与控制国家重点实验室,吉林长春130025 [3]中国科学院上海光学精密机械研究所,上海201800

出　　处：《光学精密工程》2014年第5期1176-1182,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51005212,No.61275110);浙江省公益计划基金资助项目(No.2011C21003);汽车仿真与控制国家重点实验室开放基金资助项目(No.20111114);中国博士后基金资助项目(No.2011M500936,No.2012T50274);中国科学院空间激光通信及检验技术重点实验室开放基金资助项目

摘　　要：基于雅敏干涉装置,提出一种新的可变载频(条纹频率可调)的径向剪切干涉仪。该干涉仪主体由两块雅敏干涉平板、两对可旋转双光楔、两个可变比例的扩束镜组成;双光楔用于调节条纹周期,以获取最佳干涉图;两扩束镜的扩束比例可变,以调节最佳剪切量。两块平板加工误差一致,同时所有光楔来源于同一楔板,参数一致,两扩束镜的性能参数也完全相同,光路对称,严格等光程。提出的干涉仪可一次性完成非球面模具的测量;并根据被测面形情况进行条纹周期和剪切量的调节,获得了最佳条纹图。最后,对球面/非球面模具表面进行了测试。结果显示:通过调节双光楔和扩束比,此干涉仪可获得较好的条纹图,为多种非球面模具的进一步高效检测提供了新的思路。A new type of radial shearing interferometer with variable carrier frequencies（fringe frequency adjustable）was proposed based on Jamin interferometric plates.The interferometer mainly consists of two Jamin plates,two pairs of rotational optical wedges and two beam expanding/reducing systems with adjustable ratios.The rotational optical wedges were used to adjust fringe periods to obtain an optimum interferogram.The two beam expanding/reducing systems with adjustable ratios could achieve an optimum shear.Moreover,the two optical plates could be machined by cutting half to achieve the same machining error.All the optical wedges and beam expanding/reducing systemswere the same in optical parameters and two optical paths were also symmetric and identical.The new interferometer could perform the measurement of aspheric lens mould at one time.The testing experiments of spherical and aspheric moulds show that the interferometer can achieve the best-quality fringe patterns and satisfactory shearing displacement at one time,which provides a solid foundation for the further measurement of various kinds of aspheric moulds.

关 键 词：雅敏干涉仪 径向剪切干涉仪 条纹图 非球面模具 

分 类 号：TH744.3[机械工程—光学工程]