TiAlCN涂层界面扩散机理与结合强度  

Interface diffusion mechanism and binding strength of TiAlCN coatings

作　　者：孔德军[1] 付贵忠[1] 郭皓元 

机构地区：[1]常州大学机械工程学院,江苏常州213016

出　　处：《光学精密工程》2014年第5期1260-1266,共7页Optics and Precision Engineering

基　　金：江苏省科技支撑计划资助项目(工业)(No.BE2012066);江苏省科技基础设施建设计划资助项目(No.BM2012337);常州市知识产权计划(战略推进)(No.CK20130017);中国学位与研究生教育学会研究课题(No.C1-2013Y07-051)

摘　　要：利用阴极弧离子镀在Cr12MoV钢表面制备了TiAlCN涂层,通过扫描电镜(SEM)、能量分散光谱法(EDS)、X射线衍射术(XRD)等手段分析了TiAlCN涂层的表面-界面形貌、化学元素分布和物相特性,并对其界面结合机理进行了探讨。结果表明,Al原子第一电离能低于Ti原子,容易从靶材上气化电离出来沉积在基体上,使得涂层中Al元素含量较高;涂层中TiN、AlN和AlTiN为硬质相,其中涂层中高含量的Al原子有利于提高抗磨损性能,无定形C原子有利于降低摩擦系数;Ti、Al、C、N等原子在涂层中产生富集现象,在结合界面处发生扩散,是形成冶金结合的主要机制。另外,用划痕法测得涂层界面结合强度为76.9N,具有较高的抗剥落能力。文中的结果为TiAlCN涂层在冷作模具表面改性处理中的应用提供了实验基础。A TiAlCN coating was prepared on the surface of Cr12MoV steel with cathodic arc ion plating.The surface-interface morphologies,chemical element distributions,and phases of the TiAlCN coating were analyzed with a Scanning Electron Microscope（SEM）,an Energy Dispersive Spectrometer（EDS）and an X-ray Diffractermetry（XRD）,respectively.The mechanism of interfacial combination of the coating was discussed.The results show that the first ionization energy of Al atom is lower than that of Ti atom and is more likely to ionize from the target and deposit on a substrate,which allows the content of Al element to be higher in the coating.The hard phases of the coating are TiN, AlN and AlTiN.The higher Al content in the coating surface is beneficial to improving abrasion resistance and the amorphous C is favour of reducing the coefficient of friction.Ti,Al,C and N elements accumulate in the coating layer and diffuse in the interface,which is the main mechanism of metallurgical bonding.The bonding strength of the coating-substrate is 76.9N,showing a higher anti ？stripping ability.Obtained results provide an experiment basis for application of TiAlCN coatings to surface modified process of cold working moulds.

关 键 词：TiAlCN涂层 阴极弧离子镀 线扫描 面扫描 结合强度 

分 类 号：TB43[一般工业技术]