基于多次平移的平面绝对检测仿真  

Simulation analysis on absolute measurement of flat with multiple translation method

作　　者：马骅[1,2] 陈波[1] 任寰[1] 刘旭[1] 刘勇[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]中国工程物理研究院研究生院,北京100088

出　　处：《强激光与粒子束》2014年第5期47-51,共5页High Power Laser and Particle Beams

摘　　要：将待测面形表示为多项式的和,通过分别沿x,y向多次平移待检光学元件得到移动前后待测元件面形差,采用最小二乘法拟合多项式系数,得到待检光学元件的绝对面形。推导了多次平移法的理论公式,并进行了仿真实验,模拟了移动次数、移动间隔和采样点数对测量精度的影响。仿真结果表明:待测平面与初始平面残差图的均方根值为5.118×10^(-13)λ,理论误差达到高精度平面面形检测要求。The precision of flat measured by relative interference is limited by the precision of standard transmission flat. The absolute measurement method can improve the measure precision by removing the error of standard transmission flat. The absolute measurement of plat with multiple translation method is an effective way to test plat surfaces with high accuracy. The surface under test can be expressed by polynomial function. Different surface profile is obtained by orthogonally shifting the tested flat in two directions orthogonal,then the absolute surface is gained by fitting of polynomial coefficients using the least squares. The theory formula of multiple translation method is deduced,and the error caused by number of sampling points, times and in- terval of translation are analyzed using the simulation. The results of simulation show that the root-mean-square（RMS）of residual figure error is 5. 118 × 10^-13λ. Thus the method can realize high accuracy measurement of flat surfaces.

关 键 词：光学检测 多次平移法 平面绝对测量 高精度面形检测 仿真分析 

分 类 号：TB96[机械工程—光学工程]