基于脉冲分组的光剂量监控新算法  

New light dose monitoring algorithm based on grouping pulse

作　　者：唐德华[1] 曹益平[1] 

机构地区：[1]四川大学电子信息学院,成都610064

出　　处：《强激光与粒子束》2014年第5期93-98,共6页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目;国家重大专项;四川省学术和技术带头人培养基金项目(07GRC-01)

摘　　要：精确控制脉冲激光加工光剂量是保证加工产品工艺和质量的关键。在对现有的光剂量控制算法进行分析后,提出了基于脉冲分组的光剂量监控新算法,有效提高了光剂量监测精度和反馈控制速度。设计了光剂量监控系统,实现了脉冲激光加工光剂量实时监测及反馈控制。与Ophir公司的StarLab激光能量测量系统相比,500个激光脉冲以内的总能量测量,本系统测量误差不超过±0.1 5%。对一套脉冲最大重复频率为10 kHz、单脉冲最大能量为5 mJ、恒压工作下最大能量波动为±10%的脉冲激光加工系统光剂量进行了监控实验。在本系统的监控下,可将日标光剂量为150 mJ/mm^2以内的加工光剂量控制精度和重复精度分别控制在0.90%和0.100mJ/mm^2以内,同时将光剂量反馈控制速度提高了4倍。Precise control of pulse laser light dose is the key to guarantee processing product technology and quality. After analyzing the existing light dose feedback control algorithm, based on grouping pulse, a new grouping pulse dose monitoring feed- hack control algorithm was proposed to effectively improve the precision and the speed of light dose monitoring and feedhack con- trol. A light dose monitoring system was designed to monitor the light dose and control the feedback in real time. Compared with the StarLab laser energy measurement made by Ophir, in the case of the total energy less than 500 laser pulses, the energy meas- urement error of the system is less than ±0.15%. Light dose monitoring experiment was carried out on a set of pulse laser ma- chining system, the max repetition frequency of which is 10 kHz, the single pulse max energy of which is 5 mJ, the max energy fluctuations of which is ±10 %0 in constant voltage. In the monitoring of the system, in the case of the target light dose within 150 mJ/mm2 , light dose control accuracy and repeated accuracy can be controlled within 1.90%and 0. 100 mJ/mm respectively, at the same time, the control speed of the light dose feedback increased 4 times.

关 键 词：脉冲激光 光剂量 实时监控 脉冲分组 能量积分 

分 类 号：TN248.2[电子电信—物理电子学]