大口径非球面元件磁流变加工稳定性研究  

Magnetorheological finishing removal stability of large aperture aspherical optics

作　　者：袁志刚[1] 唐才学[1] 陈贤华[1] 侯晶[1] 郑楠[1] 邓文辉[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2014年第5期177-180,共4页High Power Laser and Particle Beams

基　　金：国家科技重大专项项目

摘　　要：重点分析了非球面元件磁流变加工的动态稳定性影响因素。设计了非球面元件的自动装调定位系统,提高了装调精度。采用一种拟合光栅式加工的新方法来验证其效果,通过测量元件表面形成的直线沟壑深度、宽度波动比例来评价去除的动态稳定性。在400 mm×400 mm口径的方形非球面元件上进行面形收敛验证实验,波长λ为632.8 nm时,加工后的透射波前误差PV值达到0.331λ,低频透射波前梯度误差GRMS值达到了0.008λ/cm。In this paper, the factors of dynamic stability of the removal function were analyzed. In order to improve the pre cision of magnetorheological finishing （MRF）, an automatic positioning system of aspherical optics was designed. A new ap proach was used for evaluating dynamic characteristics of removal function. At the same time, a verification experiment was car ried out on 400 mm× 400 mm square aspheric, the PV of the surface precision was 0. 331 λ and the GRMS value was 0. 008λ/cm The ability of aspherical optics of the magneto-rheological processing was verified.

关 键 词：磁流变 非球面 面形精度 动态稳定性 

分 类 号：TH161[机械工程—机械制造及自动化]