红外衍射微光学元件的湍流波前模拟和再现(英文)  

Turbulence wavefront simulation and representation by diffractive micro-optics elements in infrared wavelength

作　　者：瞿勇[1,2,3] 张新宇[1,2,3] 桑红石 谢长生[3] 季安[4] 张天序 

机构地区：[1]多谱信息处理技术国防科技重点实验室,湖北武汉430074 [2]图像识别与人工智能研究所,湖北武汉430074 [3]华中科技大学武汉光电国家实验室,湖北武汉430074 [4]中国科学院半导体研究所,北京100083

出　　处：《红外与激光工程》2014年第5期1522-1528,共7页Infrared and Laser Engineering

基　　金：国家自然科学基金(61176052,60777003);武汉国家光电实验重点基金(0101187006)

摘　　要：基于衍射微光学理论,发展了一种面向红外波段衍射微光学元件的设计和制作方法。采用标准半导体技术工艺流程制作了若干个器件。文中设计的红外衍射元件主要用于形成复杂的光场,其振幅和相位都能有效地得到控制。所制造的衍射微光学元件,通过在元件表面形成良好的相位图案,把普通的高斯光束转换成所需要的经大气湍流环境影响后的图形。该结构能够被用于产生湍流波前从而模拟大气湍流中的光场,进而再现波前以评估大气湍流的影响。A method was developed based on the diffractive micro-optics theory for design and fabrication of diffractive micro-optics elements employed in infrared wavelength range. Several elements were fabricated by standard semiconductor technological process. Infrared diffractive elements were mainly used to form complex light fields, and both of the intensity or amplitude and the phase of light out from the elements mentioned above, can be processed efficiently. Above all, the diffractive micro-optics elements produced by the introduced method can transfer common Gaussian beams into desired images which have been affected by atmospheric turbulence through creating fine patterns over the surface of the elements, and the structures can be used to generate turbulence wavefront for simulating the light field in atmospheric turbulence, and then represent wavefront for evaluating the influence of atmospheric turbulence.

关 键 词：衍射理论 半导体技术工艺 波前 大气湍流 

分 类 号：O436.1[机械工程—光学工程]