光学镜面间隔测量中的色散研究  

Research of Dispersion in Measurement of Optical Lens Gap

作　　者：郭帮辉[1,2] 李明[1] 孙强[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033 [2]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2014年第6期99-104,共6页Laser & Optoelectronics Progress

基　　金：吉林省科技厅发展计划项目(20125092);中国科学院院地合作项目(2011CJT0004)

摘　　要：材料的色散会影响镜面间隔的测量精度,为了提高光学干涉法测量镜面间隔的精度,对材料色散效应进行理论分析和数值仿真,分别对LAK9、ZF6、H-ZF2、BAK7、K9光学玻璃进行仿真测试,得到了干涉信号峰值偏移量关系式,信号峰值偏移量与材料的一阶色散系数成正比。为了验证该关系式的正确性,搭建了一个镜面间隔测量实验平台,实验测量得到的干涉信号最大值偏移量与仿真测试结果的相对误差小于2%,考虑到实验过程中的误差因素,证明仿真测试得到的结果是正确的。The dispersion of optical material influences the accuracy of lens gap measurement. In order to improve the accuracy of lens gap measurement, the effect of optical material dispersion is investigated by the theoretical analysis and numerical simulations. An expression of interference signal offset is obtained by numerical simulation for materials of LAK, ZF6, H- ZF2, BAK7 and Kg, with the offset proportional to the first order dispersion coefficient of optical material. An experimental platform is set up to verify the simulation result, and it is shown that the relative error of interference signal offset between the experimental and simulation results is below 2%. Considering various error factors in the experiment, the relative error of 2% is reasonable and the obtained expression via simulations is correct.

关 键 词：光学系统 光学干涉 色散 镜面间隔 光学装调 镜面间隔测量 短相干 

分 类 号：TN23[电子电信—物理电子学] O439[机械工程—光学工程]