基于白光扫描干涉术的非球面光学元件大范围评价方法  

Large Range Evaluation Method Based on White Light Scanning Interferometry for Aspheric Optical Elements

作　　者：马龙[1] 张鸿燕[1] 牛一凡[1] 郭彤[2] 

机构地区：[1]中国民航大学中欧航空工程师学院,天津300300 [2]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《激光与光电子学进展》2014年第6期117-126,共10页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51205397);中央高校基本科研业务费中国民航大学专项(3122014H004)

摘　　要：通过白光扫描干涉术研究了用于非球面元件的大范围测量方法并利用纳米测量机(NMM)构建了测量系统。对系统的运行环境进行分析,定量给出了评定结果。在系统环境得以保证的前提下,重点研究了无重叠拼接方法,并将结果进行了对比;针对周期性非球面光学表面,提出通过白光倾斜扫描干涉法进行测量。扫描过程中,测试样品倾斜通过干涉区,消除了物镜视场的影响,使毫米量级表面一次扫描即可完成测量。针对扫描过程,分析了扫描过程中干涉条纹移出视场现象及双角度不一致对测量结果的影响。White light interferometry is employed to research on the measurement technology for large scale evaluation and a dedicated system is developed on the platform of nano-measuring maching （NMM）. Firstly, this work calibrates the environment effects and the results are given quantitatively. Secondly, under the condition of the precise environment control, the non-overlapping stitching method is investigated, and the comparison of the results is also made; For non-periodic array aspheric optical surface, white light tilted scanning interferometry is employed to perform the large range measurement. During the scan, the specimen moves through the coherence area along a sloping direction, and the objective field of view limitation is removed. Hence, within one round of scan, the surface in millimetre scale can be successfully evaluated. For the scanning process, this article analyzes the interferogram slipping out and the impact due to the difference of the two angles appeared in this technology. Finally, the comparison between the above two methods is given.

关 键 词：测量 大范围评价 无重叠拼接 白光倾斜扫描干涉术 非球面光学元件 

分 类 号：TN247[电子电信—物理电子学]