实用的MEMS惯性器件外场标定方法  

Outfield calibration method for practical MEMS inertial device

作　　者：任建新[1] 杜亚宁[1] 杨星辉[1] 赵兴梅[1] 

机构地区：[1]西北工业大学自动化学院,陕西西安710072

出　　处：《传感器与微系统》2014年第6期27-30,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60974109)

摘　　要：在实际工程应用中,当不具备高精度实验室标定设备时,研究简易可行的MEMS惯性器件外场标定算法非常有必要。在分析MEMS惯性器件误差模型的基础上,提出一种基于椭球模值约束算法的外场标定方法,通过设计合理的实验编排方案和有效的求解算法来实现对误差模型参数的估计。对比实验结果表明:所提出的标定方法简易可行,其误差系数在合理的误差范围内,从而证明了该外场标定方法的有效性。In practical engineering application, when lack of high precision laboratory calibration device, it is very necessary to study simple and available outfield calibration algorithm for MEMS inertial device. On the basis of analysis on error model of MEMS inertial device, propose an outfield calibration method that based on algorithm of ellipsoid model value constraint, and through designing reasonable experimental layout scheme and effective algorithm to realize estimation of error model parameters. By comparing experimental resuhs, it shows that the proposed calibration method is available, and error coefficient within reasonable range of error, which proves validity of this method.

关 键 词：MEMS惯性器件 外场标定 误差模型 椭球模值约束 

分 类 号：U666.1[交通运输工程—船舶及航道工程]