流体二维振动超精密抛光实验研究#  

Experimental research on ultra precise polishing based on liquid two-dimension vibration

作　　者：杨忠高[1] 何冰强[2] 郭钟宁[3] 

机构地区：[1]广东工贸职业技术学院,广州510510 [2]广东机电职业技术学院,广州510515 [3]广东工业大学,广州510090

出　　处：《现代制造工程》2014年第6期99-103,共5页Modern Manufacturing Engineering

基　　金：国家自然科学基金项目(50375029);广东省自然科学基金项目(04009486)

摘　　要：基于流体二维振动超精密抛光方法对石英玻璃进行了抛光实验研究,将超声波作为振动源,驱动抛光液在水平和垂直两个方向耦合振动实现对工件的抛光。测试了振动场中的声强,讨论了不同输入电压对声强的影响。分析了不同流场状态、工件装夹方式、磨料粒度以及抛光时间对抛光效果的影响,并得出了一些基本规律。The polishing experiment research of quartz glass based on liquid two-dimension vibration is carried out by a vibrating device which is driven by ultrasonic sources in horizontal and vertical direction and can produce coupling vibrations of liquid . Sound pressures of some key points in water are tested by hydrophone and translated into sound intensity to evaluate the effect of input voltage of transducer .It is analyzed which vibration state of fluid field and the way that workpiece is clamped is the best for the polishing .How the abrasive particle size and time to influence the polishing result is also studied , and some polishing rules are presented .

关 键 词：抛光 超精密 流体二维振动 超声 

分 类 号：TH16[机械工程—机械制造及自动化]