4Cr13不锈钢表面多弧离子镀制备(Ti,Cr)N薄膜的高温氧化行为（英文）  

High-Temperature Oxidation Behavior of(Ti,Cr)N Coating Deposited on 4Cr13 Stainless Steel by Multi-arc Ion Plating

作　　者：蔡航伟[1] 高原[1] 袁琳[1] 马志康[1] 王成磊[1] 

机构地区：[1]桂林电子科技大学,广西桂林541004

出　　处：《稀有金属材料与工程》2014年第5期1084-1087,共4页Rare Metal Materials and Engineering

基　　金：National Natural Science Foundation of China(51264007);National Science Fund for Young Scholars(51201043);The Guangxi Natural Science Fund Key Project of China(2010GXNSFD013008);Guangxi Science and Technology Development Scientific Research Projects(12118020-2-2-1);Guangxi Information Materials Key Laboratory Project(1210908-10-Z)

摘　　要：在4Cr13不锈钢表面进行多弧离子镀沉积(Ti,Cr)N涂层,研究不同Cr含量的(Ti1-xCrx)N(x=0.28,0.56,0.73)复合薄膜在700℃的高温氧化行为。考察了薄膜氧化后的表面形貌、成分等。用热重法(TG)与差示扫描量热分析法(DSC)分析(Ti,Cr)N薄膜的加热氧化情况,并与TiN薄膜进行对比。结果表明:随着铬靶弧电流(ICr)的提高,(Ti1-xCrx)N薄膜中的Cr含量增加,Cr含量与ICr/ITi存在着线性关系;Cr含量越高,(Ti1-xCrx)N薄膜的高温抗氧化性能越好;(Ti1-xCrx)N薄膜的氧化热力学温度均高于TiN薄膜,表明Cr的加入明显提高了薄膜的氧化热力学温度。（Ti, CON coatings were deposited on 4Cr13 stainless steel by multi-arc ion plating. High-temperature oxidationbehaviors of （Ti1-xCrx）N （x=0.28, 0.56, 0.73） coatings with different chrome contents were investigated at 700 ℃. And surfacemorphologies and surface compositions of oxidized coatings were also studied. Thermal analysis experiments of （Ti,Cr）Ncoatings were conducted by thermogravimetry （TG） and differential scanning calorimetry （DSC）, and the results were com-pared with TiN coating. The results show that Cr content in the （Ti1-xCrx）N coating increases with the elevation of the arc cur-rent of Cr target, and a linear relation exists between Cr content and the ratio of arc current of Cr target and Ti target （ICr/ITi for short）. The higher the Cr content is, the better the high-temperature oxidation resistance of （Ti1-xCrx）N coating is, and the oxi-dation thermodynamics temperatures of （Ti1-xCrx）N coating are higher than that of TiN coating, which indicates that the oxida-tion thermodynamic equilibrium temperature of the coating elevates observably with the addition of Cr.

关 键 词：CR含量 (Ti1-xCrx)N薄膜 高温氧化行为 热分析 

分 类 号：TG174.442[金属学及工艺—金属表面处理]