钨丝-CVD钨复合材料制备及性能分析  

Preparation and Performance Analysis of Tungsten Wire-CVD Tungsten Composite Material

作　　者：马捷[1] 李辉[1] 魏建忠[1] 王从曾[1] 

机构地区：[1]北京工业大学,北京100124

出　　处：《稀有金属材料与工程》2014年第5期1234-1237,共4页Rare Metal Materials and Engineering

摘　　要：采用自制实验装置,通过化学气相沉积钨过程中间断缠绕钨丝,得到钨丝-CVD钨复合材料。测试分析了材料的密度、成分及显微硬度;通过压溃试验计算出钨复合材料的压溃强度,通过拉伸试验和三点弯曲试验分别绘出拉伸和弯曲曲线。实验结果表明,化学反应温度控制在550℃,WF6和H2流量分别控制在2 g/min和1 L/min时,可得到没有孔洞的致密涂层。与相同工艺条件下不缠钨丝CVD钨样品相比,钨丝-CVD钨复合材料仍具有较高的纯度、致密度,显微硬度大致相同,而压溃强度、抗拉强度和抗弯强度大大提高。A kind of composite material, tungsten wire-CVD tungsten was fabricated by winding tungsten wire on the substrateperiodically in the CVD process using the homemade CVD device. The density, composition and micro-hardness were tested and analyzed;the crushing strength was calculated according to crushing test; the tensile and bending curves were obtained according to tensile test andthree-point bending test. The results show that the dense coating without holes can be obtained when the chemical reaction temperature iscontrolled at 550 ℃ and the flows of WF6 and H2 are controlled at 2 g/min and 1 L/min, respectively. Compared with the CVD tungstensamples without wound tungsten wire under the same process conditions, the tungsten wire-CVD tungsten composite materials stillpossesses high purity and density, the similar micro-hardness, but the crushing strength, the tensile strength and the bending strength areimproved greatly.

关 键 词：钨丝 CVD钨 复合材料 力学性能 

分 类 号：TB302[一般工业技术—材料科学与工程]