外加磁场对小功率电感耦合微波微等离子体激励的影响  

Effects of Magnetic Field on Low-Power Inductively-Coupled Microwave Micro-Plasma Excitation

作　　者：廖斌[1] 王新刚[1] 黄加华[1] 朱守正[1] 

机构地区：[1]华东师范大学信息学院电子系,上海200241

出　　处：《西安交通大学学报》2014年第6期98-102,共5页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目(61072007)

摘　　要：为使小功率微波微等离子体源进一步小型化,提出了通过外加磁场减小微波微等离子体激励功率的方法。首先对2.45GHz平面微带渐变螺旋天线进行数值仿真,得到最佳结构尺寸;其次在螺旋天线上加载高斯磁感应强度分别为360、990和2 840Gs的环形磁铁,测试得到加载磁场前后的S参数;最后通过改变磁铁及磁极方向,研究其对小功率电感耦合微波微等离子体激励的影响。实验结果表明:当空气气压为666.6Pa时,磁场强度和磁极方向均可使小功率微波微等离子体的激励功率和熄灭功率发生变化,且磁铁S极朝外更有利于激励;随着磁场强度的增大,激励功率逐渐减小;外加磁场时的最小激励功率比未加载磁场时的激励功率减小了15%。该研究结果在微化学分析系统、小尺寸材料的表面处理等领域具有良好的应用前景。A method to decrease the igniting power of microwave microplasma through adding magnetic field is proposed to further miniaturize low-power microwave micro-plasma source.Simulation on a planar microstrip tapered spiral antenna at 2.45 GHz is performed to obtain the optimal structure.Values of S parameters are measured through applying the ring magnets of 360,990 and 2 840 Gs on the spiral antenna.Finally,the excitation effects of low-power microwave micro-plasma are investigated by changing the magnetic field strength and the magnetic orientation.Experimental results show that both the igniting and the extinguishing ofmicrowave microplasma changes with the changes in the strength and the orientation of the added magnetic fields at the air pressure of 666.6 Pa.The S-pole outward of the ring magnet motivatesto ignite microwave micro-plasma more easily,and the igniting power decreases as the strength ofadded magnetic field increases.A comparison with the igniting power without adding magneticfield shows that the minimum igniting power with adding magnetic field reduces about 15％.It can be concluded that the proposed method has potential applications in the fields of microchemical-analysis system and surface processing of small-scale materials.

关 键 词：微波 微等离子体 螺旋天线 外加磁场 激励功率 

分 类 号：TN99[电子电信—信号与信息处理]