剧烈-温和阳极氧化结合法快速制备有序阳极氧化铝膜的研究  

Fast Fabrication of Highly Ordered Porous Anodic Alumina Membranes by Hard-mild Anodization

作　　者：郝爱文[1,2] 黄丽清[1] 程龙[1] 李新[1] 张薇薇[1] 单冬至 冯雪红[1] 

机构地区：[1]西安交通大学理学院 物质非平衡合成与调控教育部重点实验室,西安710049 [2]中国洛阳电子装备试验中心,洛阳471000

出　　处：《无机材料学报》2014年第6期645-649,共5页Journal of Inorganic Materials

基　　金：陕西省科学技术研究发展计划项目(2012K07-19)~~

摘　　要：本研究采用剧烈–温和阳极氧化(hard anodization-mild anodization,HA-MA)结合快速制备高度有序多孔阳极氧化铝(porous anodic alumina,PAA)膜的方法,即先利用HA在铝表面快速形成有序凹坑阵列,然后再对表面留有有序凹坑的铝基进行温和阳极氧化,制备出有序PAA膜。研究了剧烈阳极氧化时氧化电压、氧化时间对所制备PAA膜有序度的影响。研究结果表明,HA-MA结合法制备PAA膜的优化HA参数为:0.3 mol/L硫酸、80 V、10 min。HA-MA结合法所制备PAA膜的有序性和机械稳定性与二步温和阳极氧化法的相近,但形成有序PAA膜所需的时间为4.5 h,约为温和阳极氧化法的1/4,极大地提高了高度有序PAA膜的制备效率。A hard-mild anodization combined method （HA-MA） for rapidly fabricating highly ordered porous anodic alumina （PAA） membranes is presented in this paper. Firstly, by using hard-anodization （HA）, the ordered pit arrays on aluminum surface were rapidly prepared and then, by using mild anodization （MA）, ordered PAA membranes were fabricated on the ordered pit arrays aluminum surface. The effect of HA parameters, such as anodization voltage and duration, on the order degree of as-fabricated PAA membranes were investigated. The results showed that the optimum HA voltage and duration in 0.3 mol/L sulfuric acid at-1.5℃ were 80 V and 10 min, respectively. The order degree and mechanical stability of as-fabricated PAA membranes were similar to that of PAA membranes fabricated by two-step MA method, but its total process duration was within 4.5 h, which cost only about 1/4 time as that of by two-step MA method, The HA-MA method greatly improved the fabrication efficiency of ordered PAA.

关 键 词：多孔阳极氧化铝 温和阳极氧化法 剧烈阳极氧化法 剧烈-温和阳极氧化结合法 

分 类 号：O611[理学—无机化学]