溶胶–凝胶法制备PHFBMA/PFG/SiO_2短波长持效增透膜（英文）  

Sol-Gel Preparation of PHFBMA/PFG/Silica Coatings with Durable Shortwave-band Antireflective Performance

作　　者：张清华[1] 惠浩浩[1] 杨伟[1] 卫耀伟[1] 王健[1] 许乔[1] 

机构地区：[1]成都精密光学工程研究中心,成都610041

出　　处：《无机材料学报》2014年第6期667-672,共6页Journal of Inorganic Materials

摘　　要：在碱性催化条件下,以正硅酸乙酯为前驱体,制备了一种新的、光谱性能持效的短波长减反膜。溶胶制备中,采用20氟基-1,12-十二醇(PFG)控制了二氧化硅颗粒的结构和尺寸,从而一定程度地减小了薄膜的折射率。以PFG修饰的二氧化硅为基础,再采用甲基丙烯酸六氟丁酯的聚合物(PHFBMA)对溶胶进行改性,得到了适用于熔石英基底的PHFBMA/PFG/SiO2减反膜。该改性减反膜在300 nm左右可以达到99.9%的透过率,并且一定湿度条件下和含有机污染物的真空腔室内的考察结果表明,该改性膜层的透过率稳定性获得了显著提升。A new silica shortwave-band antireflective （AR） coating with durable optical performance on fused silica substrate was prepared by a base-catalyzed Sol-Gel process using tetraethyl orthosilicate （TEOS） as a precursor. 1H, 1H, 12H, 12H-perfluoro-dodecane-1, 12-diol （simplified as PFG） was used to control the structure and size of the sil-ica particles in the sols, and hence decreased the refractive indices of the coatings. After Poly （2, 2, 3, 4, 4, 4-hexafluorobutyl） methacrylate （PHFBMA） being introduced into the silica sols, the AR coatings could retain a transmission about 99.9%at about 300 nm. At the same time, the transmission stability of the coatings was improved significantly, which were tested in a moisture environment and an organic-containing vacuum chamber, respectively.

关 键 词：减反膜 溶胶-凝胶 短波 疏水性 有机污染物 

分 类 号：TQ174[化学工程—陶瓷工业]