掺胺碳膜及其对甲酸蒸气传感特性  

Amino-group Doping a-C∶H Films and Its Sensitive Properties for Formic Acid Vapors

作　　者：颜永红[1] 曾云[1] 曾健平[1] 尹霞[2] 张红南[1] 陈宗璋[2] 

机构地区：[1]湖南大学应用物理系,长沙410082 [2]湖南大学化学化工学院,长沙410082

出　　处：《微细加工技术》2001年第1期41-44,36,共5页Microfabrication Technology

基　　金：湖南省自然科学基金资助项目(湘科技字[1999]358号)

摘　　要：用射频等离子体化学沉积方法制备氢化非晶碳 (a C∶H)膜。在等离子体气氛中引入胺基团 ,则能够在a C∶H薄膜沉积过程中将胺基团掺入薄膜的网络结构中。喇曼光谱表明薄膜具有无序态结构。红外分析表明薄膜中有胺基团存在 ,将掺胺的a C∶H薄膜作为质量传感膜沉积到石英晶体表面制成气相质量传感器。测试表明掺胺a C∶H膜对甲酸蒸气具有高的响应灵敏度 。The a?C∶H films was prepared by plasma chemical vapor deposition method.The amino?group was introduced into plasma atmosphere.So the amino?group can be doped into network structure of a?C∶H film.Raman analysis indicates that the a?C∶H films possess amorphous structure and the IR spectrum shows that there exists amino?group in the network structure.The a?C∶H film containing amino?group was deposited on the surface of quartz crystal to fabricate the Vapour phase mass sensor.Measurement showed that the a?C∶H films containing amino?group possess high sensitivity,good linear coefficient and wide linear response range for formic acid vapour.

关 键 词：氢化碳膜 胺掺杂 质量响应 

分 类 号：O484.4[理学—固体物理]