光学表面中高频误差的仿真分析  

Simulation of mid-and-high frequency errors of optical surface

作　　者：廖志波[1] 焦文春[1] 伏瑞敏[1] 

机构地区：[1]北京空间机电研究所,北京100190

出　　处：《红外与激光工程》2014年第6期1905-1908,共4页Infrared and Laser Engineering

基　　金：国家重大科技专项

摘　　要：在光学设计和装调过程中,常常需要随时根据面形质量来预估光学系统的性能,传统的方法都是借助泽尼克多项式拟合光学表面面形来进行仿真评价。但非球面光学元件在加工过程中常常产生中高频误差,这类误差会引入小角度的散射,进而影响光学系统像质评价。提供了一种"点对应点"的仿真方法,通过准确评价面形质量获得高精度的像质预估结果,解决了传统的泽尼克多项式不能描述中高频成分的关键问题。该方法在实际光学系统中进行了验证,仿真结果和实测数据吻合度优于90%。During the process of optical design and assembly ,it is necessary to estimate the performance of optical system based on the surface quality of the mirrors. The traditional way is to use the Zemike polynomial, which is restricted to depict the consecutive and smooth surface. Otherwise, get the ideal surface during aspherical surface polishing is very difficult, the mid-and-high frequency errors which is very harmful to the optical system＇s image quality will be produced at the same time. In this paper, a new ＂point-to-point＂ method was introduced, any surface with mid-and-high frequency errors could be exactly simulated, and the optical system＇s performance can be estimated accurately. An example of the optical system was cited, it was revealed that the camera＇s simulated performace is very close to the measurement, the coincident to real system is over 90%.

关 键 词：表面面形 中高频误差 泽尼克多项式 仿真 

分 类 号：TH706[机械工程—仪器科学与技术]