利用原子力显微镜观测气敏薄膜的平整度  

Observation of surface flatness of gas sensing films with atomic force microscopes

作　　者：孙冰 田丰[2] 齐景爱[2] 高金雍[2] 阎国英[2] 

机构地区：[1]天津市计量研究所,天津300192 [2]河北工业大学,天津300401

出　　处：《传感器世界》2014年第6期19-22,4,共5页Sensor World

摘　　要：介绍原子力显微镜功能、原理和结构,用于检测原子之间的接触来呈现样品的表面形貌特性,如粗糙度、起伏不平整度等,提供三维表面图像。常用的是激光反射检测系统,由探针、激光发生器和光检测器组成。探针是由悬臂和悬臂末端的针尖组成,悬臂是由Si或Si3N4经光刻技术用MEMS技术加工而成。当在样品表面扫描的探针引起悬臂梁弯曲时,产生应力。再由压电陶瓷能将十几分之一纳米到几微米的位移而导致的应力信号转换成1mV^1000V的电信号,以代表样品表面的不平整度。同时简单介绍了利用原子力显微镜观察不同退火温度对制备的气敏传感器薄膜表面晶粒度的影响,以及不同腐蚀液抛光硅片的效果。The functions, principle and structure of atomic force microscopes（AFMs） are introduced in this paper. AFMs are used to detect the contact among atoms to show the morphology characteristics of sample surfaces, such as roughness and fluctuation unevenness , and provide 3D surface images. The laser detection system is applied commonly, which includes a probe, a laser and a light detector. The probe consists of a cantilever and a cantilever tip at its end. The cantilever is fabricated and processed by lithography with Si or Si3N4 materials using MEMS technologies. When the probe scans the sample surface, the cantilever beam is bended and the stresses are produced at same time. A piezoelectric ceramic on its end can convert the stress signals to electric signals of lmV-1000V, which result from the micro displacements from more than ten percent of nanometers to several microns, and then the roughness of sample is measured. It is also introduced how to use AFMs to observe the effect of different annealing temperatures on grain size of gas sensing films and polishing effect of different etching liquids on wafers.

关 键 词：原子力显微镜 功能 原理和结构 薄膜表面粗糙度 不平整度 

分 类 号：TH742[机械工程—光学工程]