基于Nd∶YVO_4晶体四波段腔面膜的研制  

Fabrication of Four Wavelengths Cavity Surface Film Based on Nd:YVO_4 Crystal

作　　者：付秀华[1] 韩放[1] 张静[1] 寇洋[1] 潘永刚[1] 

机构地区：[1]长春理工大学光电工程学院,长春130022

出　　处：《光子学报》2014年第5期66-70,共5页Acta Photonica Sinica

基　　金：国家自然科学基金(No.60977052)资助

摘　　要：黄光激光器作为一种接近人眼敏感区域的激光器在诸多领域都发挥着重要的作用,而谐振腔又是激光器中重要组成部分.本文以Nd∶YVO4(c-cut)晶体为基底,利用真空镀膜设备研制出四波段腔面膜.通过分析膜系设计过程中膜层电场强度和优化膜系,使膜层中驻波场强得到合理分布,从而在理论上减小膜层损伤的可能性;通过TFCalc软件对测试结果进行工艺反馈分析,经过多次模拟实验,发现在不同控制波长下,采用相同监控方法监测不同的膜厚比例系数,通过调整工具因子解决了光谱曲线漂移的问题,制备出膜层牢固、化学性能稳定、满足四个波段光谱输出的黄光激光器腔面膜.The yellow laser, which is close to the sensitive area of human eyes, plays an important role in many fields, and the resonant cavity is an important component of laser. A four wavelengths cavity surface film by using a vacuum coating equipment was developed based on Nd ： YVO4 crystal （c-cut）. First, in the process of film system design, the distribution of standing wave field reasonably in the film was made by analyzing the film field strength and optimizing the film system, thus to reduce the possibility of film damage theoretically. Then, through technics feedback analysis to the test result by TFCalc and several simulation experiments, it was found that in different wavelengths the film thickness ratio is different even in the same monitoring method. And the problem of spectral curve drift was solved by adjusting the tool factor. Finally, the yellow laser cavity surface film with firm film and stable chemical performance was prepared, which also met the requirements of four wavelengths spectral output.

关 键 词：薄膜光学 腔面膜 膜系设计 黄光激光器 掺钕钒酸钇晶体 

分 类 号：O484.8[理学—固体物理]