Design and fabrication of superconducting transition edge sensor bolometers with background limited noise performance  

作　　者：Qingya Zhang Jianshe Liu Wenhui Dong Tianshun Wang Genfang He Tiefu Li Xingxiang Zhou Wei Chen 

机构地区：[1]Tsinghua National Laboratory for Information Science and Technology, Tsinghua University [2]Institute of Microelectronics, Department of Micro/ Nanoelectronics, Tsinghua University [3]Department of Optics and Optical Engineering, University of Science and Technology of China [4]CAS Key Laboratory of Quantum Information, University of Science and Technology of China

出　　处：《Chinese Science Bulletin》2014年第19期2292-2297,共6页

基　　金：supported by the National Basic Research Program of China (2011CBA00304);Tsinghua University Initiative Scientific Research Program (20131089314); the National Natural Science Foundation of China (60836001 and 11273023)

摘　　要：We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries.The measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 mK.These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.We successfully designed and fabricated TES bolometers utilizing A1/Ti bilayer TESs as sensitive thermometers. To reduce the intrinsic noise level and tune the saturation power of a bolometer, the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries. The measurement results show that the detectors have background limited noise performance, with a low noise equivalent power （NEP） on the order of 10-17 W/HZ1/2 and have a saturation power of several tens pW at a bath temperature of 320 mK. These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.

关 键 词：测辐射热计 噪声性能 超导转变 制造 设计 传感器 饱和功率 检测器具 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH811[自动化与计算机技术—控制科学与工程]