阵列式陶瓷微流道的粉末微注射成形及力学性能  

Injection molding process and mechanical properties of ceramic microchannel array

作　　者：王长瑞[1] 肖竑[1] 邵奎武[1] 卢振[2] 张凯锋[2] 

机构地区：[1]南京电子技术研究所,南京210039 [2]哈尔滨工业大学材料科学与工程学院,哈尔滨150001

出　　处：《粉末冶金材料科学与工程》2014年第3期380-385,共6页Materials Science and Engineering of Powder Metallurgy

基　　金：2010年度高等学校博士学科点专项科研基金资助项目(20102302120002)

摘　　要：采用粉末微注射成形技术制得ZrO2阵列式微流道,研究粉末粒径和注射成形工艺对微流道性能的影响规律。结果表明:通过优化注射工艺参数可以有效避免注射坯中缺陷的产生;不同粉末粒径的试样烧结后,致密度和力学性能均随烧结温度的升高先增大后减小;中位粒径为200 nm粉末粒径的试样最佳烧结温度为1 500℃,致密度为99.5%;中位粒径为100 nm粉末粒径的试样最佳烧结温度为1 250℃,致密度为98.4%,均近完全致密。纳米级粉末的使用可有效降低烧结温度、提高力学性能;粉末粒径从200 nm下降到100 nm时,粗糙度值从1.92下降到1.32。烧结后的阵列式微流道的直径为(450±5)μm,具有很好的圆度,尺寸误差<1.5%。ZrO2 microchannel array was manufactured by powder micro-injection molding. The effects of particle size, injection parameters and sinter process on the relative density and mechanical properties were analyzed. The results show that forming defects can be removed through optimizing the injection parameters. The relative density and mechanical properties increase firstly and then decrease with increasing the sintering temperature. The optimum sintering temperature of ZrO2 microchannel array using 100nm and 200 nm powders are 1 250 ℃ and 1 500 ℃, respectively. The relative density is 99.5% for using 100 nm powders and 98.4% for 200 nm powders at optimum sintering temperature. The sintering temperatures are decreased and the mechanical properties are improved effectively for the sintered ceramic samples by using nano-order powders. The roughness of sintered ceramic microchannel array drops from 1.92 to 1.32 with decreasing the particle size from 200 nm to 100 nm. Sintered microchannel arrays with the diameter of （450＆#177;5）μm possess good roughness and low diameter deviation （＆lt;1.5%）.

关 键 词：粉末微注射成形 微流道 微观组织 力学性能 

分 类 号：TF124[冶金工程—粉末冶金]