定容法正压漏孔校准装置  

A Novel Type of Pressure Leak Calibration Apparatus in Constant Volume Method

作　　者：卢耀文[1,2] 齐京[1] 陈旭[1] 刘志宏[2] 张明志[2] 闫睿[1] 徐天伟[3] 查良镇[1] 

机构地区：[1]清华大学,北京100084 [2]北京东方计量测试研究所,北京100086 [3]中科院微电子研究所,北京100029

出　　处：《真空科学与技术学报》2014年第6期579-584,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：研制出定容法正压漏孔校准装置。采用满量程分别为133 Pa（差压式）、1.33×10^5Pa（绝压式）的两台高精度电容薄膜真空计测量压力变化,通过全金属密封结构减小定容室漏放气对测量结果的影响;采用高精度半导体双级恒温系统获得了296±0.02 K的恒温效果,减小温度对漏孔漏率的影响;通过三个不同的标准体积作为定容室,拓宽装置的校准范围。研究结果证实,研制的校准装置仅采用定容法实现了3×10^-1~4×10^-8Pa·m^3/s的校准范围,合成标准不确定度为1.2%~3.2%。A novel type of pressure leak calibration apparatus was developed in constant volume method. Two high precision capacitance diaphragm gauges （CDG）, with differential and absolute pressure types and covering full scales of 133 and 1.33 × 10^5 Pa, were used to measure the change of pressure. The influence of the leak or outgassing on the mea- sured results were decreased with all-metal seal structures,and the impact of temperature on the leak rate was reduced by using high precise semiconductor two-stage constant-temperature system, which can keep the temperature within 296 ± 0. 02 K. Besides, three different standard volumes were used as the constant-volume chambers to extend the calibration range. The test results prove that the newly-developed apparatus in constant volume method only, reaches the calibration range of 3 × 10^-1 -4 × 10^-8 Pa·m^3/s with the combined standard uncertainty of 1.2% ~ 3.2%.

关 键 词：正压漏孔 校准 检漏 定容法 

分 类 号：TB77[一般工业技术—真空技术]