基于电化学加工的微钠探针制备技术  

Micro and Nano Probe Fabrication Based on Electrochemical Machining

作　　者：王玉峰[1] 曾永彬[1] 曲宁松[1] 吴修娟[1] 朱荻[1] 

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《电加工与模具》2014年第A01期38-40,共3页Electromachining & Mould

基　　金：国家自然科学基金资助项目(91023018)

摘　　要：提出了基于液膜电化学加工原理制备尖锥形和大长径比探针的方法。分析了液膜电化学加工方法的机理,并采用静态液膜法制备出针尖曲率半径为40 nm的尖锥形探针,再通过动态液膜电化学加工方法,即在工件阳极施加往复直线运动的方法制备出具有大长径比的探针。对动态液膜法的成形机理进行了阐述,通过试验分析得出加工电压、电解液浓度、运动参数等对探针长径比和平均直径的影响规律,并制备出长径比达70、平均直径为300 nm的大长径比探针。This paper proposed methods for the fabrication of conical and high-aspect-ratioprobes, based on the liquid membrane ECM. The principle of liquid membrane ECM has beenanalyzed, and the conical shape probe with the tip radius of curvature of 40 nm was processed usingstatic liquid membrane ECM. Furthermore, the dynamic liquid membrane ECM which applied thestraight reciprocating motion to the anode was employed to fabricating high-aspect-ratio probe. Themachining mechanism of the dynamic liquid membrane ECM was explored, and experiments wereconducted to investigate the influence of the applied voltage, electrolyte concentration and kinematicsparameters including amplitude and velocity on the fabricated probes. By using the optimal parameters,probes with aspect ratio of up to 70 and average diameter of 300 nm were successfully obtained.

关 键 词：探针 尖锥状 大长径比 液膜电化学加工 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]