纳米级光学超精密加工技术  

Nano-scale Optical Superprecision Machining

作　　者：于劲[1] 曹健林[1] 

机构地区：[1]中国科学院长春光学精密机械研究所应用光学国家重点实验室,长春130022

出　　处：《物理》1992年第12期726-731,共6页Physics

摘　　要：纳米级光学超精密加工是软Ｘ射线光学和光电子学元件制备的重要基础技术之一．本文概述这一技术研究的主要内容并介绍近１０年来特别是８０年代后期在这一研究领域的最新进展，例如单点金刚石车削、可延展磨削、浮法抛光以及离子束抛光等．超精密加工的最终目标是直接操纵原子，本文还介绍了用扫描隧道显微镜（ＳＴＭ）实现亚纳米级超精密加工的可能性．The past decade has seen rapid progress in nano scale optical superprecision machining, a basic technology of great importance for the fabrication of soft X-ray and photoelectronic optical components. We present the latest advances in this field, including single point dia- mond turning, ductile grinding, float polishing and ion beam polishing. In addition, we di- scuss the possibility of using,the scanning tunneling nicroscope in sub-nano superprecision machining, to achieve the ultimate goal of moving atoms or molecules directly. Sub-nano superprecision machining will become one of the major high technologies of the next century.

关 键 词：超精加工 纳米级 光学元件 

分 类 号：TN205[电子电信—物理电子学]