分光光度法测定多晶硅生产尾气回收氢中的微量磷化氢  

Spectrophotometric Method for Determination of Trace Phosphine in the Hydrogen Recycled from Polysilicon Production Off-gas

作　　者：亢若谷[1] 张云晖[1] 于艳敏[1] 李晓华[1] 赵建为[1] 金波[1] 

机构地区：[1]昆明冶研新材料股份有限公司,云南省光电子硅材料制备技术企业重点实验室,云南曲靖655000

出　　处：《云南冶金》2014年第3期61-64,共4页Yunnan Metallurgy

摘　　要：采用溴水作为吸收溶液，将尾气回收氢中的微量磷化氢氧化吸收、富集后生成磷酸。在酸性介质中正磷酸与钼酸铵反应生成磷钼杂多酸，用抗坏血酸还原为蓝色的络合物，然后采用分光光度法于700nm波长处测定吸光度，间接计算出磷化氢含量。实验结果表明，在0—400wg／L浓度范围内磷的线性关系良好（r=0．999），方法检出限为0．045μg／L。该方法操作快速简便，可应用于多晶硅生产尾气回收氢中微量磷化氢的测定。The trace phosphine in the hydrogen recycled from off-gas is oxidized, absorbed and enriched to generate phosphoric acid by the absorbent solution-bromine water. The phosphoric acid reacts with the ammonium molybdate in the acid medium to generate ammonium phosphomolybdate which is then reduced to blue complex by ascorbic acid, then the absorbanee is determined in 700 nm wave length by speetrophotometric method, so that the phosphine content can be calculated indirectly. The test results show that the linear relation of phosphorous is good （r = 0. 999） with the concentration range of 0 -400 μg/L, the detection limit of the method is 0. 045 μg/L. The operation of this method is fast and simple, which can be used to determine the trace phosphine content in hydrogen recycled from polysilieon production off-gas.

关 键 词：溴水 吸收 分光光度法 磷化氢 

分 类 号：O657.32[理学—分析化学]