基子厚膜技术的电容式集成压力传感器的感压元件研究  

Pressure-Sensitive Sensor Study of Thick Film Integrated Capacitance Pressure Transducer

作　　者：马以武[1] 虞学犬 

机构地区：[1]中国科学院合肥智能机械研究所,合肥230031 [2]传感技术国家重点实验室,合肥230031

出　　处：《电子元器件应用》2001年第4期16-18,共3页Electronic Component & Device Applications

摘　　要：采用厚膜技术研制新型电容式集成压力传感器用感压元件,具有抗干扰能力强,灵敏度高,受分布电容、寄生电容影响小,耐腐蚀,耐高温的特点。本文主要介绍其原理、感压元件设计,并对非线性等相关技术及工艺问题进行了探讨。A new style of pressure-sensitive sensor of integrated capacitance pressure transducer is developed based on thick film technology. The capacitance pressure-sensitive sensor has anti-interference, high sensitivity, low parasitic capacitance, low distributed capacitance, resistant to elevated temperatures and corrosion resistant. In this paper, the principle and designing of this style of pressure-sensitive sensor is described, and the technology such as nonlinear etc is discussed as well.

关 键 词：厚膜 电容式 压力传感器 感压元件 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]