基于投影栅相位法的透明体表面微观形貌测量  

The Measurement of Transparence Surface Microtopography Based on Phase-approaching of Projected Grating

作　　者：司书春[1] 王蕴珊[1] 于复生[2] 周灿林[1] 

机构地区：[1]山东工业大学数理系,山东济南250061 [2]山东工业大学机械系,山东济南250061

出　　处：《光电子．激光》2001年第3期281-284,共4页Journal of Optoelectronics·Laser

摘　　要：投影栅线相位法通常用于宏观三维形貌的测量 ,本文提出将其应用于透明体微观形貌领域的测量 ,从而拓展了测量方法的测量领域。实际测量了准分子激光近视治疗仪加工的有机玻璃试样 ,给出了表面的微观形貌。系统的横向分辨率小于 1μm,纵向分辨率小于 0 .1μm。根据微观形貌计算了描述表面光洁度的参数 ,为计算激光束能量分布及治疗仪的校准提供了依据。Phase-approaching of projected grating is used in the measurement of three-dimensional surface usually.This paper describes the measurement techniques of transparence surface microtopography based on this method,so the field of this method is developed.The surface microtopography of PMMA disk processed by laser medical treatment machine for myopia is measured,the horizontal resolution is less than 1 μm and the veritcal resolution is less than 0.1 um.The maximum peak to valley surface finish is calculated,this can help to calculate the laser bean energy field and adjust the medical treatment machine.

关 键 词：表面微观形貌 投影栅相位法 二维傅立叶变换 测量 

分 类 号：TN247[电子电信—物理电子学]