多阴极金属蒸气真空弧离子源  

A multi-cathode metal vapor vacuum arc ion source

作　　者：朱祥正 张荟星[1] 张孝古 

机构地区：[1]北京师大低能核物理研究所

出　　处：《核技术》1991年第8期479-484,共6页Nuclear Techniques

摘　　要：设计了一台多阴极的金属蒸气真空弧离子源,它有18个阴极,任一阴极都能在真空状态下被迅速接入电路工作。这是一种新型的强流金属离子源,特别适用于离子注入、材料改性。在脉冲工作方式下,引出了Al、Ti、Cr、Ni、Cu和Nb等元素的离子,平均束流达10mA以上,引出束流与阴极材料、弧流、引出电压等有关。该源的工作真空度为300μPa。A multi-cathode metal vapor vacuum arc (WEVVA) ion source has been designed. It contains an array of 18 cathodes, any of which can be switched into operation rapidly while under vacuum. As a new kind of intense current metal ion source, it is very suitable for the application of ion implantation and material modification. In a pulsed mode, a time-average ion beam current in excess of 10 mA has been extracted for a range of elements such as Al, Ti, Cr, Nl,Cu,Nb etc. The ion beam current depends on cathode material, arc current, extractor voltage etc. Its operating vacuum pressure is 300μPa.

关 键 词：离子源 真空弧放电 等离子体 

分 类 号：TL629.1[核科学技术—核技术及应用]