激光多普勒效应测量面内位移一些问题的研究  

Analyses of Some Problems of the In-plane Displacement Measurement by Laser Doppler Effect

作　　者：李彬 梁晋文[1] 殷纯永[1] 

机构地区：[1]清华大学精仪系

出　　处：《计量学报》1994年第4期286-291,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金

摘　　要：本文采用散斑干涉理论研究固体表面面内位移测量的激光多普勒效应方法。理论和实验表明测量结果中存在一项随机相让误差，尽管该误差可在一定程度上补偿，但不能消除，因而限制了测量精皮的提高。此外，本文还给出了测量过程中信号随机消失的原因以及延长信号不间断距离的方法。The theory of speckle interferometry is applied to study the measurement of the in-plane displacement of solid surface by laser Doppler effect. Theoretical analyses and experiments prove that there is a random phase error in the measurement,which, although may be compensated to a certain extent, will impede further improvement of measurement accuracy. Besides, the reason of the random signal drop-out in the measurement is also studied, and the method of extending the range in which the signal maintains continuous is given as well.

关 键 词：面内位移 测量 激光多普勒效应 散斑干涉计量 随机相位误差 固体表面 

分 类 号：O348.12[理学—固体力学] TH74[理学—力学]