高温超导红外探测器的研制  

DEVELOPMENT OF HIGH T_c SUPERCONDUCTING INFRARED BOLOMETERS

作　　者：陈举新[1] 石保安[1] 周炳[1] 吴汝佳[1] 何文莲[1] 贡树行[1] 曹效能[2] 杨彩炳[2] 方希曾[2] 李淑琴[2] 闫旭[2] 张鹰子[3] 赵玉英[3] 李林[3] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]中国科学院电子研究所,北京100080 [3]中国科学院物理研究所,北京100080

出　　处：《红外与毫米波学报》1991年第6期459-464,共6页Journal of Infrared and Millimeter Waves

摘　　要：用在两种衬底(SrTiO_3和LaAlO_3)上生长的YBa_2Cu_3O_(7-x)。薄膜制成高灵敏的热敏型高温超导红外探测器。经500K标准黑体的测量,在10Hz调制频率时,以SrTiO_3为衬底的器件,D~*(500,10,1)达8.2×10~8cm·Hz^(1/2)/W,NEP(500,10,1)达1.6×10^(10)W/Hz^(1/2);以LaAlO_3为衬底的器件,NEP(500,10,1)达10^(-11)W/Hz^(1/2)。还测量并分析了D~*和NEP随频率的变化和噪声频谱。High T_c superconducting infrared bolometers have been developed by using two kinds of YBa_2Cu_3O_(7-x) thin films sputtered on SrTiO_3 and LaAlO_3 substrates respectively. The performances of the bolometers are measured by using a standard blackbody at 500K. The NEP(500, 10, 1) of the bolometer on SrTiO_3 is 1.6×10^(-10)W/Hz^(1/2), its D~*(500, 10, 1) is 8.2×10^(-8)cm·Hz^(1/)/W. The NEP(500, 10, 1) of the bolometer on LaAlO_3 is 10^(-11)W/Hz^(1/). The frequency dependence of the detectivity and responsivity and the noise spectrum are measured respectively and analyzed in this paper.

关 键 词：超导 红外探测器 测辐射热计 高TC 

分 类 号：TN215[电子电信—物理电子学]