具有准梯度结构膜的金刚石性能研究  

Research on the Properties of Diamond Coated with Quasi-gradient Film TiC+Ti(NC)_x+TiN

作　　者：陈叔鑫[1,2,3] 林锡刚[1,2,3] 彭放[1,2,3] 罗伯成[1,2,3] 

机构地区：[1]四川大学原子分子物理研究所,610064 [2]四川大学原子核科学技术研究所 [3]辐射物理及技术国家教育部重点实验室

出　　处：《金刚石与磨料磨具工程》2001年第2期12-13,共2页Diamond & Abrasives Engineering

基　　金：教育部重点试验室基金项目

摘　　要：On apparatus of magneto controllable sputter a multi layer film is experimentally formed on the surface of diamond by using low temperature plasma. After high temperature sintering the film can be transformed into quasi gradient structure. Through experimental comparision, its high bond strength and anti oxidation is observed.On apparatus of magneto controllable sputter a multi layer film is experimentally formed on the surface of diamond by using low temperature plasma. After high temperature sintering the film can be transformed into quasi gradient structure. Through experimental comparision, its high bond strength and anti oxidation is observed.

关 键 词：金刚石 性能 工具 准梯度结构膜 

分 类 号：TG704[金属学及工艺—刀具与模具]