V_2O_5光电薄膜的溶胶-凝胶制备及性能研究  

Preparation and Characterization of Photoelectric V_2O_5 Thin Films Prepared by the Sol-gel Technique

作　　者：方国家[1] 王汉忠[1] 吉向东[1] 

机构地区：[1]襄樊学院 物理学系信息功能材料研究室,湖北襄樊441053

出　　处：《襄樊学院学报》2001年第2期16-21,共6页Journal of Xiangfan University

基　　金：湖北省自然科学基金资助项目!(99J049);湖北省教育厅资助的优秀中青年人才项目!(99B019)

摘　　要：以V_2O_5为原料，苯甲醇、异丁醇为溶剂，采用溶胶—凝胶（Sol-Gel）工艺制备了V_2O_5薄膜. 采用差热-失重（DTA-TG）、付里叶红外光谱(FT-IR)、X-射线衍射（XRD）等分析手段研究了V_2O_5薄膜的结构特性. 并研究了V_2O_5薄膜的透射光谱、气敏、伏安特性及温阻特性. 实验发现沉积在ITO导电玻璃衬底上的V_2O_5薄膜，烧结温度越高，透光性能越好；V_2O_5薄膜在常温下对NOx气体具有一定的气敏性能.Using non-alkoxide V_2O_5 as precursors, benzyl alcohol and iso-butanol as solvents, V_2O_5 thin films were prepared by the sol-gel technique. In this paper, the thermal decomposition and crystallization process of V_2O_5 gel powders has been characterized with DTA-TG analysis. The structural properties of V_2O_5 thin films were analysed by using X-ray diffraction (XRD), Fourier transformation infrared spectrum (FT-IR). The transmittance spectrum, resistance vs. working temperature (R-T) relation, Voltage-current (V-I) relation and gas sensing properties concerning about V_2O_5 thin films have been also studied. Experimental results illustrated that the transmittance of V_2O_5 thin film increases with the increase of annealing temperature. V_2O_5 thin film has good sensitivity toward NO_x gas at room temperature.

关 键 词：Sol-Gel工艺 V2O5薄膜 物相 晶格常数 结构分析 气敏性能 透射光谱 伏安特性 ITO导电玻璃衬底 

分 类 号：O484[理学—固体物理] TB302[理学—物理]